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However, the widespread application of MEMS relays has been limited due to the issue of the dispute between reasonable actuation voltages and high product overall performance. This article presents a novel cantilever MEMS relay with an embedded contact electrode that will help to realize a minimal actuation voltage (below 8 V) and high restoring force simultaneously. Meanwhile, the contact resistance is as reduced as around 0.4 Ω and also the reliability is verified. To carefully investi
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