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Multi-axis motion system is widely applied in commercial industrial machines such as precision CNC machine tools, Robot manipulator and laser cutting machines, etc. Contour accuracy plays a major role for the multi-axis servo motion system. The contour machining accuracy is related to the synthesis of single-axis position accuracy and multi-axis linkage accuracy. Only improving the single-axis tracking performance cannot effectively guarantee the machining accuracy of multi-axis system. The primary objective of this study was to design a