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The experiments have actually aimed to give a static running to a stopper, exploiting electrostatic actuation to go a huge shuttle against it, up to failure. The failure device seen in the tested devices has been captured by the numerical simulations. The data have been then interpreted because of the Weibull concept for three various stopper sizes, causing an estimation regarding the guide out-of-plane power of polysilicon from the order of 2.8-3.0 GPa, in accordance with various other outcome
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